|
06FC201 |
|||
|
光纖調整 |
Tx |
6mm |
分辨率0.001mm |
|
Ty |
±2mm |
分辨率0.0005mm |
|
|
Tz |
±2mm |
分辨率0.0005mm |
|
|
θy |
±4° |
分辨率5″ |
|
|
θz |
±4° |
分辨率5″ |
|
|
顯微物鏡調整 |
Tx |
13mm |
分辨率0.001mm |
|
整體傾斜調整 |
θ |
±4° |
分辨率5″ |